DI WATER HEATERS

Designed for the ultra pure demands of the semiconductor industry, Process Technology offers a full line de-ionized water heaters designed for your most demanding applications. Sizes range from 3,000 watts up to 260,000 watts. The patented designs incorporate unique features for superior thermal response. The heaters are available in quartz or fluoropolymer wetted parts for the most demanding high purity applications. All high purity heaters are assembled in an ISO5 (Class 100) cleanroom. Also available are heaters made from titanium wetted parts for less critical, but still virtually contamination free performance. Many custom configurations are available.

Available DACTM software provides outstanding temperature stability for demanding flow/temperature requirements. This outstanding control software is available for any of our DI water heaters.

These heaters are available with UL/ETL, CE and SEMI S2/S3 certifications.


Lufran Fluoropolymer Water Heaters: Proven technology for UPDI heating applications. Patented purged element design offers exceptional MTBF. Conforms to Semi standards and CE compliant. Sizes available up to 260kW. Available patented DACTM software provides accurate temperature control for different flow and temperature requirements.

H2OT SHOTTM Quartz Water Heaters: Resistive element design for maximum life with no bulbs to ever change out. Ultra pure quartz wetted parts for maximum cleanliness. Conforms to Semi standards and CE compliant. Sizes available up to 144kW. Available patented DACTM software provides accurate temperature control for different flow and temperature requirements.

TytanTM Water Heaters: Titanium elements for long life. This heater is a low cost, high quality alternative for heating non-critical DI water applications. Semi and CE compliant configurations available upon request. Sizes available up to 144kW. Wall mounted up to 72kW.

INLINE CHEMICAL HEATERS

Inline chemical heaters are used in wet process manufacturing applications were inline heating is preferred over immersion heating methods. Process Technology inline heaters are manufactured in fluoropolymer and high purity quartz materials. Sizes are range up to 12,000 watts. A large variety of standard and custom configurations are available. Applications include temperatures up to 180 degrees centigrade.

Lufran Fluoropolymer Chemical Heaters: Durable inline heater for virtually any chemistry including: HF and KOH.

H2OT SHOTTM Quartz Chemical Heaters: All quartz wetted parts. Excellent choice for SC1, SC2, and other quartz compatible applications. Exceptionally easy maintenance.

SOLVENT HEATERS

SoltanTM Inline Solvent Heaters: Electric heater with stainless steel construction designed for safe heating of NMP, EKC 265, EKC 830, ACT 690, ACT 970 and other solvents.

NITROGEN HEATERS

N2 Inline Nitrogen Heaters: Electric stainless steel construction for heating of nitrogen up to 160° C.

CONSTANT TEMPERATURE BATHS

Process Technology specializes in small volume chemical baths manufactured in fluoropolymer, PP and PVDF materials for corrosive chemistry. Industries that these baths are utilized in include semiconductor, FPD, MEMS, biomedical and pharmaceutical. Simple baths with or without immersion heaters are available as well as many options including integrated pump/filters, condensing coils, custom covers and control systems.

SB/RB/NE Series Constant Temperature Chemical Baths: All three standard bath systems include a PFA tank, temperature control, a PTFE immersion heater and redundant safeties.

• SB baths are PFA chemical tanks systems designed for SC1/SC2, BOE and many other acid applications.
• RB baths add a chemical condensing coil to the SB systems for KOH and other similar applications.
• NE baths add both a condensing coil and an automatic DI water replenishment for phosphoric acid applications.

Etch TechTM series, Cascade Process Baths: Non-breakable PFA tank. For use with integral in-tank heater or external inline heater.

FiltranTM series, Recirculating Filter Etch Baths: Polypropylene or PVDF construction for applications such as HF up to 110° C. Integral pump, filter and PTFE heater. Good choice for buffered oxide etch requirements.

CQDR series, Cascading Quick Dump Rinse Tank: Rapid dumping action. Polypropylene, polyethylene or PVDF tank.

ELECTRIC IMMERSION HEATERS

Fluoropolymer heaters for chemical baths are available in sizes up to 6,000 watts. Two primary styles are available. The TFB/TFW series offer an extremely small package size and a patented “purge” system that provides unique safety features and extremely long element life. The HX series is fully grounded heater of extremely rugged construction. Control systems are available for all immersion heaters.

TF series, Immersion Heaters: Patented N2 purge feature for extended service life. Compact design.

HX series, Immersion Heaters: Metal ground for safety. Rugged design for long life.

HEAT EXCHANGERS

Inline fluoropolymer heat exchangers offer unsurpassed chemical resistance and customized sizing specific to your application. Stainless steel spiral plate heat exchangers offer compact size and excellent thermal exchange efficiencies. Virtually any chemical application can be sized with the help of our excellent engineering department. Process Technology also offers a wide selection of immersion style heat exchangers in a larger variety of materials and configurations in our industrial product offerings.

XC series, In-line Heat Exchangers: For inline heating or cooling of chemicals with hot water, steam or chilled water.

TherMax2 Spiral Plate Heat Exchangers: Compact, low carbon stainless steel design. Ideal for solvent heating/cooling.

Off-the-Shelf and Custom-Built Coils and Heat Exchangers

HIGH TEMPERATURE FILTERS

LTFH series, Filter: Reusable housing of heavy wall PTFE capable of applications up to 180° C. Utilizes standard single open-end filter cartridges with 222 O-ring seal.