CDE
ResMap ï Smart
Area Map can follow flat,
Can change pattern Aspect ratio
Has rectangular Pattern
Can map on rectangular pattern and substrates
Contour Map spacing can be set to % or `d
All data files can port to spreadsheet like EXCEL, or word processors,
etc.
ï Standard Circular Mapping Pattern
Small,
Less clean room real-estate
8" autoload system only 12" wide
12" manual load system only 15" wide (smaller than
most 6" or 8" system).
Automatic SMIF systems with built in pod handler and minienvironment
is only 17" wide (less than 1/3 of competitors').
ï Fast
Data collection time < 0.1sec per site
49 sites/ wafer takes less than 1 minute
Throughout about 50 wafers/ hour for 49 site/ wafer, or 130
wafers/ hour for 5 sites.
ï Reputable
Use digital and statistical technology to collect data, takes
up to 4000 samples of different voltages and current at each
site, better repeatability and reject spurious noise.
Customer has performed GaugeRR and Long term stability with
superb results. System seldom needs calibrations.
ï Versatility & Easy to Use
Windows and DOS software. Software to do calibrations, alignments,
hardware stress test, wafer load/ unload cycling, etc. Versatility
trend charts. Available SECSII automation interface.
ï Reliable
Open system designed for high reliability, easy to maintain.
Integrated Wafer Handler reduce size and increase reliability.
ï Adaptable
CDE is very effective in improving system to customers' request.
The customers design our best features.
ï Affordable
Lower cost in the industry, price less than 50% of many competitors' |